DATE :
13-05-18
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Applications in 2005 increased 22.9% compared to the previous year
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HIT :
3,018
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Date: June 8, 2006
Source: KIPO
According to KIPO (Commissioner JUN, Sang Woo), the number of patent applications for technologies related to semiconductor processing has continuously increased for the last 3 years.
In 2004, the increase rate of applications was a mere 6.6%. In 2005, the increased rate of both domestic and foreign applications increased dramatically, reaching an amazing 22.9% increase as compared to the previous year.
The analysis of this increase was done by comparing and studying the related application trend during the recent 3 years after dividing the semiconductor processing technologies into 5 processes based on IPC classification; Exposure, Deposition, Cleaning/CMP, Etching and Diffusion/Ion injection.
In 2005, applications related to exposure numbered 35% of the overall applications related to semiconductor processing technologies. In 2004, foreign applications related to exposure decreased by 18.9%. In 2005, however, it dramatically increased by 54.7%, luring the overall increase rate of 23.7%.
In case of applications related to deposition, the increase rate was 44.8% as compared to the previous year, marking the highest among the 5 processes. Such an increase was based on the development of various deposition technologies introduced by the active development of nano-class semiconductors with a circuit width less than 100nm. One of these deposition technologies is atomic layer deposition (ALD), where ultra-thin layers in Å units are deposited.
While the increase in the rate of foreign applications related to etching boggled, domestic applications showed a dramatic increase during the recent 2 years, 29.4% in 2004 and 23.6% in 2005. Such increase shows that domestic development is being actively made related to etching technologies, such as plasma etching technology.
In the case of applications related to cleaning, CMP, diffusion and ion injection, the increase rate was relatively low compared to other processes.
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